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Products : Plasma Systems

  Descriptions & Applications

* Surface treatment by Homogeneous & Glow plasma
* Low voltage, power & temperature
* High uniformity, efficiency & productivity
* No
streamer, arc & damage
* Display,
(F)PCB, semiconductor, nano, MEMS, Film(Roll to Roll) fields
* Medical/Bio(diabetes diagnosis kit & liquid biopsy kit for cancer diagnosis),
   Dental(Implant), Beauty fields

* Pretreatment for bonding, molding, marking, printing, coating, painting
* Surface activation, cleaning, ashing, etching & removing static electricity


 
System Specifications

* RF Power(13.56Mhz)   : 300W, 600W, 1kW, 3kW (DBD Type)
* MF Power(22~23Khz)  : 7~8kV, ~150W (Pin
& Gun Type)
* Plasma Head Size       
  : 100mm ~ 500mm (Standard) - ( > 500mm : Option)
* Gas  
usage                      : Ar (O2, H2, etc.)




               Manual System

* Head length : 150~200mm(Standard)

* Stage : Manual

* Ar, O2 control : flowmeter
or MFC

* Head gap adjustment : Manual
 

* Delivery : R & D purpose








               All in One System

* Head length : 150~300mm(Standard)

* Stage : Automatic by Motor

* Ar, O2 Control : MFC

* Head gap adjustment : Manual

* Operation : Micom with touch screen

* Delivery :
liquid biopsy kit for cancer diagnosis












   
              
Modular System


* Head length : 150~400mm(standard)

* Stage : Customizing

* Ar, O2 control : MFC

* Head gap adjustment : Manual

* Operation : Up to customer

* Delivery : diabetes diagnosis kit





























         
          
Conveyor & R To R System

* Head length : 550mm(Standard)

* Stage : Conveyer Belt

* Motor speed
 &  System control : PLC

* Ar, O2 Control : MFC

* Head
gap Adjustment : Manual

* Operation : touch screen

* Delivery : Thin copper film(R to R)























                 
Pin Type Plasma

* Low temperature plasma and focused area 
  treatment

* Handheld type plasma head

* Plasma diameter : 1~2mm

* Plasma length : ~15mm

* Ar Flow : 1.5 slm/min

* Voltage : 7~8kV

* Current ; 25mA

* Voltage frequency : 22~23kHz







Gun Type Plasma


* Low temp. & Ozone, None electric shock

* For Medical/Bio/Beauty applications

* Plasma flame diameter : 1~2mm

* Plasma
flame length : ~10mm

*
Gas flow : Ar(5~8slm), O2(5~10sccm)

* Output voltage : 3~4kV

*
Frequency : 30~120kHz

* Duty : 14~50%




















           Implasma(Dental) System

* Application : Surface treatment of Implant

* Plasma Type : Surface DBD(Tube)

* Ar control & Flow : Solenoid valve & 5 slm

* Input power : 24VDC, 5A

* MF Voltage & frequency : ~12kV & ~50kHz

























            Contact Angle Test
System

* Simply measuring the surface modification
   effect after plasma treatment

* Simple configuration of the manual
   measurement

* Contact angle measurements of left and right
   drop images

* LED light source is adopted to getting the
   sharp images

* Generating an optimized images by adjusting
   the X, Z axis